FOM Valorisation Prize 2010 for Fred Bijkerk

19 July 2010
The Foundation FOM has awarded the FOM Valorisation Prize 2010 to Prof.dr. Fred Bijkerk (FOM Institute Rijnhuizen and the MESA+Institute for Nanotechnology, UT).

Fred Bijkerk receives the prize, worth 250 thousand Euro, for his work on multilayer optics for short wavelength light, such as Extreme Ultraviolet (EUV) light. The prize will be awarded together with the other scientific FOM prizes during the annual Physics@FOM conference on 18 January 2011. The prize is intended as an inspiring example for other researchers to stimulate valorisation of physics research.

A 'valorisation highlight' stemming from Bijkerk's work, realised in the FOM-Industrial Partnership Programme 'Extreme UV multilayer optics'. The picture shows one of two so-called EUV Alpha Demo Tools, advanced photolithography equipment using the ultrashort 13.5 nm wavelength. These prototype 'EUV scanners' are now used in a pilot-plant for the fabrication of semiconductor systems such as flash memory or computer processors. Bijkerk's technique will also be used in the next generation EUV scanners, of which six have been sold to computer chip manufacturers.

About the prize

The FOM Valorisation Prize has been created by the FOM Foundation for Fundamental Research on Matter to stimulate valorisation of physics research. The prize is awarded annually to a researcher who has succeeded in making his research results of use for society. The winner of the FOM Valorisation Prize receives a sum of 250,000 Euro, of which 235,000 euro are intended for new research or valorisation projects. The remainder of 15,000 Euro can be used at the prize winner's discretion.