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2012

Zhao CL, Deng CY, Sun WZ, Zhang JY, Chen F, He PN, Chen X, Gou FJ. 2012. Etching Mechanisms of CF3 Etching Fluorinated Si: Molecular Dynamics Simulation. Plasma Science & Technology. 14:670-674. Abstract

Zhao C, Lu X, He P, Zhang P, Sun W, Zhang J, Chen F, Gou F. 2012. CF3+ etching silicon surface: A molecular dynamics study. Vacuum. 86:913-916. Abstract