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Filters: Keyword is ENERGETIC CF3+ [Clear All Filters]

2012

Zhao C, Lu X, He P, Zhang P, Sun W, Zhang J, Chen F, Gou F. 2012. CF3+ etching silicon surface: A molecular dynamics study. Vacuum. 86:913-916. Abstract

2008

Gou F, Zen LT, Meng CL. 2008. Molecular dynamics simulations of CF3 etching of SiC. Thin Solid Films. 516:1832-1837. Abstract