nSI - Completed projects

Completed projects include:

• the SenterNovem funded project Advanced multilayer coatings for high volume EUV lithography (ACHieVE), with partners ASML, Carl Zeiss SMT AG, Philips Extreme UV GmbH, SAGEM, and Media Lario
• XUV Metrology, an STW Valorisation Grant project executed with Scientec Engineering
• In situ monitoring of contamination layers on EUV optics at Angstrom resolution (ISitCLEAR), a project funded by M2i and ASML
• Photolytic salt formation at oxide surfaces, by M2i and ASML