The Development of Equipment for the Semiconductor Industry: Methods, Materials and Physics
 
                        Ernst Granneman
             Executive Scientist Thermal Products
                        ASM Europe B.V.

 
 

The following aspects of the development of advanced semiconductor manufacturing equipment
will be discussed:

-- The organizational process that is followed during the development process

-- Materials that play an important role in semiconductor manufacturing equipment
   (e.g. very pure construction materials that are used at high temperatures)

-- The type of physics that is used to develop such equipment. As an example, 
   an advanced wafer `annealing' machine will be discussed, one in which 300mm
   wafers are heated to temperatures of 1100°C within 2s, with a temperature 
   uniformity of < 1°C.