@article{5480,
  author = {J. Verhoeven and H. Zeijlemaker and E. J. Puik and M. J. van der Wiel},
  title = {On the Use of H+ and Ar+ Ions for High Spatial-Resolution Depth Profiling},
  year = {1990},
  journal = {Vacuum},
  volume = {41},
  number = {4-6},
  pages = {1327-1329},
  month = {1990},
  isbn = {0042-207X},
  doi = {10.1016/0042-207x(90)93948-i},
  language = {eng},
}