@article{5498, author = {E. J. Puik and G. E. van Dorssen and M. J. van der Wiel and J. Verhoeven and G. Vanderlaan and H. A. Padmore}, title = {Characterization of the Resolving Power of a Double Multilayer Monochromator in the Energy-Range of 600-900 Ev}, abstract = {Two different pairs of x-ray reflecting multilayer coatings have been tested in a double crystal monochromator configuration. The two pairs consisted of Ni (0.4 nm)-C (1.85 nm) and NiSi (0.4 nm)-C (1.85 nm), both with 225 periods. In order to determine the resolution in the energy range of 600-900 eV, the photoelectron yield of several 3d transition metal compounds was recorded as well as the throughput around the Ni L lines. We found for both pairs a resolving power of 220. Simulations taking into account the angular divergence of the x-ray beam yield a resolution of 250. The difference with the observed value can be due to the nonhomogeneity of the multilayer coating.}, year = {1991}, journal = {Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films}, volume = {9}, number = {6}, pages = {3142-3148}, month = {Nov-Dec}, isbn = {0734-2101}, doi = {10.1116/1.577185}, language = {eng}, }