@article{5859,
  author = {M. Yan and W. J. Goedheer},
  title = {A kinetic simulation of the effect of frequency on the power dissipation in VHF SiH4/H-2 discharges},
  year = {1998},
  journal = {Czechoslovak Journal of Physics},
  volume = {48},
  pages = {257-262},
  month = {1998},
  isbn = {0011-4626},
  doi = {10.1007/s10582-998-0051-7},
  language = {eng},
}