@article{6178,
  author = {A.C.W. Biebericher and W.F. van der Weg and W. J. Goedheer and J.K. Rath},
  title = {Mechanism of argon treatment on a growing surface in layer-by-layer deposition of hydrogenated amorphous silicon},
  year = {2002},
  journal = {Journal of Non-Crystalline Solids},
  volume = {299},
  pages = {74-78},
  month = {Apr},
  isbn = {0022-3093},
  url = {<Go to ISI>://000175757400016},
  note = {Part A},
  language = {eng},
}