@article{6291,
  author = {A.C.W. Biebericher and W.F. van der Weg and J.K. Rath and M.R. Akdim and W. J. Goedheer},
  title = {Gas-efficient deposition of device-quality hydrogenated amorphous silicon using low gas flows and power modulated radio-frequency discharges},
  year = {2003},
  journal = {Journal of Vacuum Science & Technology A},
  volume = {21},
  number = {1},
  pages = {156-166},
  month = {Jan-Feb},
  isbn = {0734-2101},
  url = {<Go to ISI>://000182598200023},
  language = {eng},
}