@article{6304, author = {M.R. Akdim and W. J. Goedheer}, title = {Modeling of dust in a silane/hydrogen plasma}, year = {2003}, journal = {Journal of Applied Physics}, volume = {94}, number = {1}, pages = {104-109}, month = {Jul}, isbn = {0021-8979}, url = {://000183642900011}, language = {eng}, }