@article{6335, author = {D. Herrebout and A. Bogaerts and R. Gijbels and W. J. Goedheer and A. Vanhulsel}, title = {A one-dimensional fluid model for an acetylene RF discharge: A study of the plasma chemistry}, year = {2003}, journal = {IEEE Transactions on Plasma Science}, volume = {31}, number = {4}, pages = {659-664}, month = {Aug}, isbn = {0093-3813}, url = {://000184833400022}, note = {Part 1}, language = {eng}, }