@article{6463,
  author = {M. J. H. Kessels and J. Verhoeven and A. E. Yakshin and F. D. Tichelaar and F. Bijkerk},
  title = {Ion beam induced intermixing of interface structures in W/Si multilayers},
  year = {2004},
  journal = {Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms},
  volume = {222},
  number = {3-4},
  pages = {484-490},
  month = {Aug},
  isbn = {0168-583X},
  url = {<Go to ISI>://000223121800016},
  language = {eng},
}