@article{6469,
  author = {K. De Bleecker and A. Bogaerts and W. Goedheer and R. Gijbels},
  title = {Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model},
  year = {2004},
  journal = {IEEE Transactions on Plasma Science},
  volume = {32},
  number = {2},
  pages = {691-698},
  month = {Apr},
  isbn = {0093-3813},
  url = {<Go to ISI>://000222278400026},
  note = {Part 2},
  language = {eng},
}