@article{6489,
  author = {K. De Bleecker and A. Bogaerts and W. Goedheer},
  title = {Modeling of the formation and transport of nanoparticles in silane plasmas},
  year = {2004},
  journal = {Physical Review E},
  volume = {70},
  number = {5},
  month = {Nov},
  isbn = {1063-651X},
  url = {<Go to ISI>://000225970700092},
  note = {Part 2},
  language = {eng},
}