@article{6601,
  author = {S. Dobrovolskiy and A. E. Yakshin and M. J. H. Kessels and J. Verhoeven},
  title = {The application of energetic CHx+ ions to form a Si/SiC multilayer system for reflection of radiation between 20 and 80 nm},
  year = {2005},
  journal = {Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms},
  volume = {237},
  number = {3-4},
  pages = {533-542},
  month = {Aug},
  isbn = {0168-583X},
  url = {<Go to ISI>://000231777800006},
  language = {eng},
}