@article{6621,
  author = {M. J. H. Kessels and F. Bijkerk and F. D. Tichelaar and J. Verhoeven},
  title = {Determination of in-depth density profiles of multilayer structures},
  year = {2005},
  journal = {Journal of Applied Physics},
  volume = {97},
  number = {9},
  month = {May},
  isbn = {0021-8979},
  url = {<Go to ISI>://000229155600023},
  language = {eng},
}