@inbook{6706,
  author = {F. Bijkerk and S. Alonso van der Westen and C. Bruineman and R. Huiting and R. de Bruijn and R. Stuik and V. Bakshi},
  title = {Flying Circus EUV Source Metrology and Source Development Assessment},
  year = {2006},
  journal = {EUV Sources for Lithography},
  chapter = {27},
  pages = {721-734},
  publisher = {SPIE},
  address = {Bellingham},
  isbn = {0819458457},
  language = {eng},
}