@phdthesis{6789, author = {I. Nedelcu}, title = {Interface structure and interdiffusion in Mo/Si multilayers}, year = {2007}, volume = {PhD}, month = {7 September 2007}, publisher = {University of Twente}, address = {Enschede, Netherlands}, isbn = {9789036525503}, url = {http://doc.utwente.nl/57926/}, language = {eng}, }