@article{6811,
  author = {F. Gou and X. Lu and Q. Qian and J.Y. Tang},
  title = {Atomic simulation of energetic fluorine interacting with Si(001)},
  year = {2007},
  journal = {Nuclear Instruments & Methods in Physics Research  B},
  volume = {265},
  pages = {479-484},
  language = {eng},
}