@article{6841,
  author = {F. Gou and A. W. Kleyn and M. A. Gleeson},
  title = {MD simulation of Ar scattering from defected Si(100) at grazing incidence},
  year = {2007},
  journal = {Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms},
  volume = {258},
  number = {1},
  pages = {52-56},
  month = {May},
  isbn = {0168-583X},
  url = {<Go to ISI>://000246457200013},
  note = {Gou, F. Kleyn, A. W. Gleeson, M. A.},
  language = {eng},
}