@article{6861,
  author = {F. J. Gou and M. Xu and W. L. Sun and T. Chen},
  title = {Deposition of amorphous fluorosilane thin film on silicon surface: Atomic simulation},
  year = {2007},
  journal = {Journal of Non-Crystalline Solids},
  volume = {353},
  number = {44-46},
  pages = {4186-4190},
  month = {Nov},
  isbn = {0022-3093},
  url = {<Go to ISI>://000250971900025 },
  language = {eng},
}