@proceedings{7064, author = {X. D. Lu and Y. Qin and J. Ning and T. Zhou and C . Y. Deng and C. Meng and Q. Qian and F. Gou and Z. Chuanwu and Y. Ying and J. Ming}, title = {Film growth by polyatomic C2H5+ bombarding a diamond (100) surfaces: Molecular dynamics study}, abstract = {The deposition of polyatomic C2H5+ ions is studied using classical molecular dynamics simulations with a new improved Brenner potentials developed by Brenner. The simulation results show that when the incident energy is less than 65 eV, the deposition coefficient of H is larger than that of C atoms. When the incident energy is larger than 65 eV, the deposition of H is less than that of C atoms. With increasing incident energy, a transition from Csp3-rich to Csp2-rich in the grown films is found. (C) 2009 Elsevier B.V. All rights reserved.}, year = {2009}, pages = {3238-3241}, publisher = {Elsevier Science Bv}, url = {://000271349500068 }, note = {ISI Document Delivery No.: 513UNTimes Cited: 0Cited Reference Count: 20}, language = {English}, }