@proceedings{7064, author = {X. D. Lu and Y. Qin and J. Ning and T. Zhou and C. Y. Deng and C. Meng and Q. Qian and F. Gou and Z. Chuanwu and Y. Ying and J. Ming}, title = {Film growth by polyatomic C2H5+ bombarding a diamond (100) surfaces: Molecular dynamics study}, abstract = {The deposition of polyatomic C2H5+ ions is studied using classical molecular dynamics simulations with a new improved Brenner potentials developed by Brenner. The simulation results show that when the incident energy is less than 65 eV, the deposition coefficient of H is larger than that of C atoms. When the incident energy is larger than 65 eV, the deposition of H is less than that of C atoms. With increasing incident energy, a transition from Csp3-rich to Csp2-rich in the grown films is found. (C) 2009 Elsevier B.V. All rights reserved.}, year = {2009}, pages = {3238-3241}, publisher = {Elsevier Science Bv}, url = {://000271349500068 }, note = {ISI Document Delivery No.: 513UNTimes Cited: 0Cited Reference Count: 20}, language = {English}, }