@article{7098,
  author = {J. Q. Chen and E. Louis and C. J. Lee and H. Wormeester and R. Kunze and H. Schmidt and D. Schneider and R. Moors and W. van Schaik and M. Lubomska and F. Bijkerk},
  title = {Detection and characterization of carbon contamination on EUV multilayer mirrors},
  abstract = {In this paper, we detect and characterize the carbon contamination layers that are formed during the illumination of extreme ultraviolet (EUV) multilayer mirrors. The EUV induced carbon layers were characterized ex situ using spectroscopic ellipsometry (SE) and laser generated surface acoustic waves (LG-SAW). We show that both LG-SAW and SE are very sensitive for measuring carbon layers, even in the presence of the highly heterogeneous structure of the multilayer. SE has better overall sensitivity, with a detection limit of 0.2 nm, while LG-SAW has an estimated detection limit of 2 nm. In addition, SE reveals that the optical properties of the EUV induced carbon contamination layer are consistent with the presence of a hydrogenated, polymeric like carbon. On the other hand, LG-SAW reveals that the EUV induced carbon contamination layer has a low Young's modulus (},
  year = {2009},
  journal = {Optics Express},
  volume = {17},
  number = {19},
  pages = {16969-16979},
  month = {Sep},
  isbn = {1094-4087},
  url = {<Go to ISI>://000269736100067 },
  note = {ISI Document Delivery No.: 493KSTimes Cited: 0Cited Reference Count: 31},
  language = {English},
}