@article{7116,
  author = {Vita Rooij-Lohmann and A. W. Kleyn and F. Bijkerk and H. H. Brongersma and A. E. Yakshin},
  title = {Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy},
  abstract = {An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.},
  year = {2009},
  journal = {Applied Physics Letters},
  volume = {94},
  number = {6},
  pages = {3},
  month = {Feb},
  isbn = {0003-6951},
  url = {<Go to ISI>://000263409400084 },
  note = {ISI Document Delivery No.: 408BWTimes Cited: 0Cited Reference Count: 19},
  language = {English},
}