@phdthesis{7195,
  author = {Vita de Rooij-Lohmann},
  title = {Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures},
  year = {2010},
  volume = {PhD},
  month = {2010/10/01},
  publisher = {University of Twente},
  address = {Enschede, Netherlands},
  url = {http://doc.utwente.nl/73280/},
  language = {eng},
}