@article{7198,
  author = {A. S. Kuznetsov and R. W. E. van de Kruijs and M. A. Gleeson and K. Schmid and F. Bijkerk},
  title = {Hydrogen interaction with EUVL-relevant optical materials},
  abstract = {Mo/Si multilayer mirrors were exposed to deuterium ions with well-defined energies in order to gain insight into the effects of Extreme UV light driven plasma generation on reflective elements in commercial lithography equipment. Post-irradiation analysis by Rutherford Backscattering Spectrometry showed erosion of both Mo and Si layers for the highest energy 50 eV/D and exposure time 5.4 x 10(4) s. Nuclear Reaction Analysis revealed detectable deuterium retention for energies a (c) 3/425 eV/D. Surface analysis by X-ray Photoelectron Spectroscopy showed erosion of the first Si layer for energies a (c) 3/45 eV/D. Inferences on the spatial distribution of trapped deuterium are made on the basis of available data regarding deuterium retention in the materials in question.},
  year = {2010},
  journal = {Journal of Surface Investigation-X-Ray Synchrotron and Neutron Techniques},
  volume = {4},
  number = {4},
  pages = {563-566},
  month = {Aug},
  isbn = {1027-4510},
  url = {<Go to ISI>://000280703600002 },
  note = {ISI Document Delivery No.: 636BTTimes Cited: 0Cited Reference Count: 9},
  language = {English},
}