@article{7277,
  author = {A. E. Yakshin and I. V. Kozhevnikov and E. Zoethout and E. Louis and F. Bijkerk},
  title = {Properties of broadband depth-graded multilayer mirrors for EUV optical systems},
  abstract = {The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial roughness, natural interlayers, number of bi-layers, minimum layer thickness, inaccuracy of optical constants, and thickness errors) are discussed. The results from an experiment on the fabrication of a depth-graded Mo/Si multilayer mirror with a wide angular bandpass in the [0, 16 degrees] range are presented and analyzed. (C) 2010 Optical Society of America},
  year = {2010},
  journal = {Optics Express},
  volume = {18},
  number = {7},
  pages = {6957-6971},
  month = {Mar},
  isbn = {1094-4087},
  url = {<Go to ISI>://000276602000050 },
  note = {ISI Document Delivery No.: 582MPTimes Cited: 0Cited Reference Count: 33},
  language = {English},
}