@phdthesis{7338,
  author = {J. Q. Chen},
  title = {Characterization of EUV induced contamination on multilayer optics},
  year = {2011},
  volume = {PhD},
  month = {1 July 2011},
  publisher = {University of Twente},
  address = {Enschede, Netherlands},
  isbn = {9789053354254},
  url = {http://doc.utwente.nl/77597/},
  language = {eng},
}