@phdthesis{7341,
  author = {A. J. R. van den Boogaard},
  title = {Ion-enhanced growth in planar and structured Mo/Si multilayers},
  year = {2011},
  volume = {PhD},
  month = {13 December 2011},
  publisher = {University of Twente},
  address = {Enschede, Netherlands},
  isbn = {9789461911209},
  url = {http://doc.utwente.nl/78771/},
  language = {eng},
}