@phdthesis{7377, author = {W. A. J. Vijvers}, title = {A high-flux cascaded arc hydrogen plasma source}, year = {2011}, volume = {PhD}, month = {28 February 2011}, publisher = {Eindhoven University of Technology}, address = {Eindhoven, Netherlands}, url = {https://research.tue.nl/en/publications/a-high-flux-cascaded-arc-hydrogen-plasma-source}, doi = {10.6100/IR710985}, language = {eng}, }