@article{7473, author = {I. V. Kozhevnikov and R. van der Meer and H. M. J. Bastiaens and K. J. Boller and F. Bijkerk}, title = {Analytic theory of soft x-ray diffraction by lamellar multilayer gratings}, abstract = {An analytic theory describing soft x-ray diffraction by Lamellar Multilayer Gratings (LMG) has been developed. The theory is derived from a coupled waves approach for LMGs operating in the single-order regime, where an incident plane wave can only excite a single diffraction order. The results from calculations based on these very simple analytic expressions are demonstrated to be in excellent agreement with those obtained using the rigorous coupled-waves approach. The conditions for maximum reflectivity and diffraction efficiency are deduced and discussed. A brief investigation into p-polarized radiation diffraction is also performed. (C) 2011 Optical Society of America }, year = {2011}, journal = {Optics Express}, volume = {19}, number = {10}, pages = {9172-9184}, month = {May}, isbn = {1094-4087}, doi = {10.1364/OE.19.009172}, note = {ISI Document Delivery No.: 762OVTimes Cited: 0Cited Reference Count: 12}, language = {English}, }