@article{7485, author = {G. Dingemans and M. M. Mandoc and S. Bordihn and M. C. M. van de Sanden and W. M. M. Kessels}, title = {Effective passivation of Si surfaces by plasma deposited SiOx/a-SiNx:H stacks}, abstract = {Very low surface recombination velocities }, year = {2011}, journal = {Applied Physics Letters}, volume = {98}, pages = {222102}, month = {May}, isbn = {0003-6951}, doi = {10.1063/1.3595940}, language = {English}, }