@article{7526, author = {K. N. Koshelev and V. V. Ivanov and V. G. Novikov and V. Medvedev and A. S. Grushin and V. M. Krivtsun}, title = {RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation (vol 11, 021112, 2012)}, year = {2012}, journal = {Journal of Micro-Nanolithography Mems and Moems}, volume = {11}, pages = {029802}, month = {Apr-Jun}, isbn = {1932-5150}, doi = {10.1117/1.JMM.11.2.029802}, language = {English}, }