@phdthesis{7536,
  author = {E. Louis},
  title = {Physics and technology development of multilayer EUV reflective optics},
  year = {2012},
  volume = {PhD},
  month = {2012/11/23},
  publisher = {Universiteit Twente},
  address = {Enschede, Netherlands},
  isbn = {9789090271637},
  url = {http://doc.utwente.nl/82463/1/thesis_E_Louis.pdf},
  language = {eng},
}