@article{7544,
  author = {V. V. Medvedev and A. E. Yakshin and R. W. E. van de Kruijs and V. M. Krivtsun and A. M. Yakunin and K. N. Koshelev and F. Bijkerk},
  title = {Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors},
  abstract = {An extreme ultraviolet multilayer mirror with an integrated spectral filter for the IR range is presented and experimentally evaluated. The system consists of an IR-transparent B4C/Si multilayer stack which is used both as EUV-reflective coating and as a phase shift layer of the resonant IR antireflective (AR) coating. The AR coating is optimized in our particular case to suppress CO2 laser radiation at a wavelength of 10.6 mu m, and a suppression of more than two orders of magnitude is demonstrated. The method allows high suppression over a large angular acceptance range, relevant for application in lithography systems. (C) 2012 Optical Society of America},
  year = {2012},
  journal = {Optics Letters},
  volume = {37},
  pages = {1169-1171},
  month = {Apr},
  isbn = {0146-9592},
  doi = {10.1364/OL.37.001169},
  language = {English},
}