@article{7571,
  author = {A. C. Bronneberg and N. Cankoy and M. C. M. van de Sanden and M. Creatore},
  title = {Ion-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films},
  year = {2012},
  journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films},
  volume = {30},
  number = {6},
  pages = {061512},
  publisher = {AVS},
  language = {eng},
}