@article{7574,
  author = {X. Chen and X. Lu and P. He and C. Zhao and W. Sun and P. Zhang and F. Gou},
  title = {Deposition and etching of SiF2 on Si surface: MD study},
  year = {2012},
  journal = {Physics Procedia},
  volume = {32},
  pages = {885-890},
  doi = {10.1016/j.phpro.2012.03.652},
  language = {eng},
}