@article{7628,
  author = {M. V. Ponomarev and M. A. Verheijen and W. Keuning and M. C. M. van de Sanden and M. Creatore},
  title = {Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition (vol 112, 043708, 2012)},
  year = {2012},
  journal = {Journal of Applied Physics},
  volume = {112},
  number = {6},
  pages = {1},
  month = {Sep},
  isbn = {0021-8979},
  doi = {10.1063/1.4747942},
  note = {ISI Document Delivery No.: 015CPTimes Cited: 0Cited Reference Count: 1},
  language = {English},
}