@article{7668,
  author = {H. C. M. Knoops and M. E. Donders and M. C. M. van de Sanden and P. H. L. Notten and W. M. M. Kessels},
  title = {Atomic layer deposition for nanostructured Li-ion batteries},
  abstract = {Nanostructuring is targeted as a solution to achieve the improvements required for implementing Li-ion batteries in a wide range of applications. These applications range in size from electrical vehicles down to microsystems. Atomic layer deposition (ALD) could be an enabling technology for nanostructured Li-ion batteries as it is capable of depositing ultrathin films (1-100 nm) in complex structures with precise growth control. The potential of ALD is reviewed for three battery concepts that can be distinguished, i.e., particle-based electrodes, 3D-structured electrodes, and 3D all-solid-state microbatteries. It is discussed that a large range of materials can be deposited by ALD and recent demonstrations of battery improvements by ALD are used to exemplify its large potential. (C) 2012 American Vacuum Society. [DOI: 10.1116/1.3660699]},
  year = {2012},
  journal = {Journal of Vacuum Science & Technology A},
  volume = {30},
  pages = {010801},
  month = {Jan},
  isbn = {0734-2101},
  doi = {10.1116/1.3660699},
  language = {English},
}