@article{7833,
  author = {A. C. Bronneberg and X. Kang and J. Palmans and P. H. J. Janssen and T. Lorne and M. Creatore and M. C. M. van de Sanden},
  title = {Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition},
  year = {2013},
  journal = {Journal of Applied Physics},
  volume = {114},
  pages = {063305},
  publisher = {AIP},
  doi = {10.1063/1.4817859},
  language = {eng},
}