@phdthesis{7837, author = {J. Bosgra}, title = {Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation}, year = {2013}, volume = {PhD}, month = {2013/07/04}, publisher = {Universiteit Twente}, address = {Enschede, Netherlands}, isbn = {9789461917942}, url = {http://doc.utwente.nl/89206/1/thesis_J_Bosgra.pdf}, language = {eng}, }