@phdthesis{7840, author = {I. A. Makhotkin}, title = {Structural and reflective characteristics of multilayers for 6.x nm wavelength}, year = {2013}, volume = {PhD}, month = {2013/10/31}, publisher = {Universiteit Twente}, address = {Enschede, Netherlands}, isbn = {9789461919120}, url = {http://doc.utwente.nl/87559/}, language = {eng}, }