@article{7873,
  author = {I. Dogan and S. L. Weeks and S. Agarwal and M. C. M. van de Sanden},
  title = {Nucleation of silicon nanocrystals in a remote plasma without subsequent coagulation},
  year = {2014},
  journal = {Journal of Applied Physics},
  volume = {115},
  pages = {244301},
  doi = {http://dx.doi.org/10.1063/1.4885195},
  language = {eng},
}