@article{7916,
  author = {Q. Huang and M. de Boer and J. Barreaux and R. van der Meer and E. Louis and F. Bijkerk},
  title = {High efficiency structured EUV multilayer mirror for spectral filtering of long wavelengths},
  abstract = {High spectral purity at longer wavelength side is demanded in many extreme ultraviolet (EUV) and soft X-ray (together also referred to as XUV) optical systems. It is usually obtained at the expense of a high loss of XUV efficiency. We proposed and developed a new method based on a periodic, tapered structure integrated with an EUV multilayer. The longer wavelength radiation is scattered/diffracted away by the tapered multilayer structure while the EUV light is reflected. The first proof-of-principle showed a broadband suppression from &\#x03BB; $=$ 100-400 nm with an average factor of 14. Moreover, a high EUV reflectance of 64.7% was achieved, which corresponds to 94% of the efficiency of a regular EUV multilayer mirror.},
  year = {2014},
  journal = {Optics Express},
  volume = {22},
  pages = {19365-19374},
  month = {Aug},
  publisher = {OSA},
  doi = {10.1364/OE.22.019365},
  language = {eng},
}