@article{7923,
  author = {Q. Huang and Daniel Mathijs Paardekooper and E. Zoethout and V. V. Medvedev and Robbert van de Kruijs and Jeroen Bosgra and Eric Louis and Fred Bijkerk},
  title = {UV spectral filtering by surface structured multilayer mirrors},
  abstract = {A surface structured extreme ultraviolet multilayer mirror was developed showing full band suppression of UV (lambda = 100-400 nm) and simultaneously a high reflectance of EUV light (lambda = 13.5 nm). The surface structure consists of Si pyramids, which are substantially transparent for EUV but reflective for UV light. The reflected UV is filtered out by blazed diffraction, interference, and absorption. A first demonstration pyramid structure was fabricated on a multilayer by using a straightforward deposition technique. It shows an average suppression of 14 times over the whole UV range and an EUV reflectance of 56.2% at 13.5 nm. This robust scheme can be used as a spectral purity solution for all XUV sources that emit longer wavelength radiation as well. (C) 2014 Optical Society of America},
  year = {2014},
  journal = {Optics Letters},
  volume = {39},
  pages = {1185-1188},
  month = {Mar 1},
  isbn = {0146-9592; 1539-4794},
  doi = {10.1364/ol.39.001185},
  language = {eng},
}