@phdthesis{7958,
  author = {S. L. Nyabero},
  title = {Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers},
  year = {2014},
  volume = {PhD},
  month = {2014/02/07},
  publisher = {Universiteit Twente},
  address = {Enschede, Netherlands},
  isbn = {9789462590700},
  url = {http://doc.utwente.nl/89419/},
  language = {eng},
}