@article{8100,
  author = {E. Zoethout and E. Louis and F. Bijkerk},
  title = {In depth study of molybdenum silicon compound formation at buried interfaces},
  year = {2016},
  journal = {Journal of Applied Physics},
  volume = {120},
  pages = {115303},
  doi = {10.1063/1.4962541},
  language = {eng},
}