@proceedings{8127,
  author = {Y. Liu and F. M. Elam and S. A. Starostin and M. C. M. van de Sanden and J. B. Bouwstra and H. W. de Vries},
  title = {Dual frequency diffuse dielectric barrier discharge in atmospheric-pressure air-like gas mixture for thin film deposition},
  year = {2016},
  journal = {GEC Workshop "Pulsed high power plasmas for the synthesis of nanostructured thin films”},
  pages = {workshop 3.},
  month = {2016/10/10},
  publisher = {GEC Workshop "Pulsed high power plasmas for the synthesis of nanostructured thin films”},
  address = {Bochum, Germany},
  url = {http://www.gec2016.de/workshops/index.html.en},
  language = {eng},
}