@article{8181,
  author = {N. Leick and J. W. Weber and A. J. M. Mackus and M. J. Weber and M. C. M. van de Sanden and W. M. M. Kessels},
  title = {Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys . 49 115504)},
  abstract = {Figure 6 was incorrectly edited in the above paper. The corrected figure is given.
},
  year = {2016},
  journal = {Journal of Physics D: Applied Physics},
  volume = {49},
  pages = {269601},
  doi = {10.1088/0022-3727/49/26/269601},
  language = {eng},
}